txheej txheem no tau raug hu ua tus kws tshawb fawb Polish thiab pej xeem ntawm Lavxias teb sab faj tim teb chaws, Jan Czochralski, uas tau tsim nws rov qab rau xyoo 1915. Qhov kev tshawb pom tau tshwm sim los ntawm kev sib tsoo, txawm hais tias Czochralski qhov kev txaus siab rau cov muaju, ntawm chav kawm, tsis yog qhov xwm txheej, vim nws kawm geology ze heev.
Daim ntawv thov
Tej zaum qhov tseem ceeb tshaj plaws ntawm kev thov ntawm txoj kev no yog kev lag luam, tshwj xeeb tshaj yog kev lag luam hnyav. Hauv kev lag luam, nws tseem siv los ua cov khoom siv dag zog rau cov hlau thiab lwm yam khoom, uas tsis tuaj yeem ua tiav hauv lwm txoj kev. Hauv qhov no, txoj kev tau ua pov thawj nws yuav luag tsis muaj kev hloov pauv thiab ntau yam.
Silicon
Monocrystalline silicon - mono-Si. Nws kuj muaj lwm lub npe. Silicon zus los ntawm Czochralski txoj kev - Cz-Si. Qhov ntawd yog Czochralski silicon. Nws yog cov khoom siv tseem ceeb hauv kev tsim cov kev sib xyaw ua ke siv hauv computers, TVs, xov tooj ntawm tes thiab txhua yam khoom siv hluav taws xob thiab cov khoom siv hluav taws xob semiconductor. silicon crystalskuj tseem siv tau los ntawm ntau qhov kev lag luam photovoltaic rau kev tsim cov pa mono-Si hnub ci hlwb. Qhov ze-zoo meej siv lead ua qauv muab silicon lub siab tshaj plaws lub teeb-rau-hluav taws xob conversion efficiency.
Muaj
High-purity semiconductor silicon (tsuas yog ob peb feem ntawm ib lab ntawm impurities) yog melted nyob rau hauv ib tug crucible ntawm 1425 ° C (2.597 ° F, 1.698 K), feem ntau yog ua los ntawm quartz. Dopant impurity atoms xws li boron los yog phosphorus tuaj yeem muab ntxiv rau molten silicon hauv cov nqi meej rau doping, yog li hloov nws mus rau p- lossis n-hom silicon nrog cov khoom siv hluav taws xob sib txawv. Ib tug precisely oriented qws-cov noob siv lead ua yog immersed nyob rau hauv molten silicon. Lub qia ntawm cov noob siv lead ua maj mam nce thiab tig tib lub sijhawm. Los ntawm kev tswj xyuas qhov kub thiab txias gradients, kos nrawm thiab kev sib hloov ceev, ib lub pob zeb loj loj tuaj yeem raug tshem tawm ntawm cov yaj. Qhov tshwm sim ntawm undesirable instabilities nyob rau hauv lub yaj yuav zam tau los ntawm kev soj ntsuam thiab pom qhov kub thiab ceev teb. Cov txheej txheem no feem ntau yog ua nyob rau hauv ib qho chaw inert xws li argon, nyob rau hauv inert chamber xws li quartz.
Industrial subtleties
Vim qhov ua tau zoo ntawm cov yam ntxwv dav dav ntawm cov khoom siv lead ua, kev lag luam semiconductor siv cov khoom siv lead ua nrog qhov ntau thiab tsawg. Thaum ntxov, lawv cov boules me me, tsuas yog ob peb ntidav. Nrog cov thev naus laus zis siab heev, cov cuab yeej siv tau zoo siv 200mm thiab 300mm txoj kab uas hla. Dav yog tswj los ntawm kev tswj qhov kub thiab txias, kev sib hloov ceev thiab cov noob tshem tawm ceev. Cov crystalline ingots los ntawm cov phiajcim no tuaj yeem ncav cuag 2 meters ntev thiab hnyav ntau pua kilograms. Cov wafers loj dua tso cai rau kev tsim khoom zoo dua vim tias ntau cov chips tuaj yeem ua rau ntawm txhua lub wafer, yog li cov tsav ruaj khov tau nce qhov loj ntawm silicon wafers. Cov kauj ruam tom ntej nce mus, 450 hli, tam sim no tau npaj yuav nthuav tawm hauv xyoo 2018. Silicon wafers feem ntau yog li ntawm 0.2-0.75mm tuab thiab tuaj yeem ua polished rau ib qho loj flatness los tsim kev sib xyaw ua ke lossis texturing los tsim lub hnub ci hlwb.
Cov txheej txheem pib thaum lub chamber yog rhuab mus txog 1500 degrees Celsius, melting silicon. Thaum cov silicon yog yaj tag, ib lub noob me me siv lead ua mounted rau ntawm qhov kawg ntawm lub rotating ncej maj mam nqis mus txog rau thaum nws nyob rau hauv qab ntawm lub molten silicon. Tus ncej rotates counterclockwise thiab crucible rotates clockwise. Lub pas nrig tig yog rub mus rau sab xis maj mam - txog 25 hli ib teev hauv kev tsim cov pob zeb ruby -los tsim ib lub pob zeb cylindrical. Lub boule tuaj yeem yog los ntawm ib mus rau ob meters, nyob ntawm seb muaj pes tsawg tus silicon hauv lub crucible.
Electrical conductivity
Cov yam ntxwv hluav taws xob ntawm silicon raug kho los ntawm kev ntxiv cov khoom xws li phosphorus lossis boron rau nws ua ntej melting nws. Cov khoom siv ntxiv yog hu ua dopant thiab cov txheej txheem hu ua doping. Txoj kev no tseem siv nrog cov khoom siv semiconductor uas tsis yog silicon, xws li gallium arsenide.
Ntse & Cov txiaj ntsig
Thaum silicon loj hlob los ntawm Czochralski txoj kev, cov yaj yog muaj nyob rau hauv silica crucible. Thaum lub sij hawm kev loj hlob, cov phab ntsa ntawm lub crucible yaj nyob rau hauv lub yaj, thiab cov resulting tshuaj muaj oxygen ntawm ib tug raug concentration ntawm 1018 cm-3. Oxygen impurities tuaj yeem muaj txiaj ntsig zoo lossis muaj kev phom sij. Ua tib zoo xaiv annealing tej yam kev mob tuaj yeem ua rau tsim cov pa oxygen deposits. Lawv cuam tshuam rau kev ntes ntawm pliaj hloov pauv hlau impurities nyob rau hauv tus txheej txheem hu ua gettering, txhim kho lub purity ntawm ib puag ncig silicon. Txawm li cas los xij, kev tsim cov pa oxygen tso rau hauv qhov chaw tsis xav tau kuj tuaj yeem rhuav tshem cov qauv hluav taws xob. Tsis tas li ntawd, cov pa oxygen impurities tuaj yeem txhim kho cov neeg kho tshuab lub zog ntawm silicon wafers los ntawm immobilizing tej dislocations uas tej zaum yuav qhia tau thaum lub sij hawm ua cov cuab yeej. Hauv xyoo 1990, nws tau sim pom tias cov pa oxygen siab kuj tseem muaj txiaj ntsig zoo rau cov hluav taws xob hardness ntawm silicon particle detectors siv nyob rau hauv ib puag ncig hluav taws xob hnyav (xws li CERN's LHC / HL-LHC tej yaam num). Yog li ntawd, Czochralski-loj silicon radiation detectors raug suav hais tias yog cov neeg sib tw tau zoo rau ntau daim ntawv thov yav tom ntej.kev sim hauv siab zog physics. Nws kuj tau pom tias muaj cov pa oxygen hauv silicon nce impurity uptake hauv cov txheej txheem tom qab implantation annealing.
Reaction problems
Txawm li cas los xij, oxygen impurities tuaj yeem hnov mob nrog boron nyob rau hauv ib puag ncig illuminated. Qhov no ua rau kev tsim cov hluav taws xob ua haujlwm boron-oxygen complex, uas txo cov kev ua haujlwm ntawm cov hlwb. Module tso zis poob los ntawm kwv yees li 3% thaum thawj ob peb teev ntawm illumination.
Cov khoom siv lead ua impurity concentration uas tshwm sim los ntawm ntim khov tuaj yeem tau txais los ntawm kev txiav txim siab ntawm kev sib cais coefficient.
Growing crystals
Crystal kev loj hlob yog txheej txheem uas muaj cov khoom siv lead ua ua ntej dhau los ua loj dua li cov molecules lossis ions hauv lawv txoj haujlwm hauv cov iav siv lead ua nce, lossis cov tshuaj hloov mus rau hauv cov siv lead ua thiab kev loj hlob ntxiv. Txoj kev Czochralski yog ib daim ntawv ntawm cov txheej txheem no. Crystal yog txhais raws li atoms, molecules, los yog ions teem nyob rau hauv ib qho kev txiav txim, rov ua qauv, siv lead ua lattice uas txuas mus rau tag nrho peb qhov ntev. Yog li, qhov kev loj hlob ntawm cov muaju sib txawv ntawm qhov kev loj hlob ntawm cov kua poob hauv qhov uas thaum lub sij hawm kev loj hlob, cov molecules los yog ions yuav tsum poob rau hauv qhov tseeb txoj hauj lwm ntawm lub lattice thiaj li yuav tau txiav txim siv lead ua kom loj hlob. Qhov no yog cov txheej txheem nthuav dav uas tau muab kev tshawb fawb ntau yam nthuav dav, xws li cov qauv hluav taws xob ntawm germanium.
Cov txheej txheem ntawm cov pob zeb loj hlob yog ua tsaug rau cov khoom siv tshwj xeeb - cov khoom siv hluav taws xob thiab cov gratings, uas yog qhov tseem ceeb ntawm cov txheej txheem ntawm crystallization ntawm cov khoom siv. Cov cuab yeej no muaj nyob hauv ntau tus neeg nyob hauv yuav luag txhua lub lag luam uas ua haujlwm nrog hlau, ntxhia thiab lwm yam khoom zoo sib xws. Thaum lub sij hawm tus txheej txheem ntawm kev ua hauj lwm nrog crystals nyob rau hauv ntau lawm, muaj ntau yam tseem ceeb discoveries (piv txwv li, hluav taws xob formula ntawm germanium hais saum toj no).
Zoo kawg
Txoj kev uas tsab xov xwm no tau mob siab rau tau ua lub luag haujlwm loj hauv keeb kwm ntawm kev lag luam niaj hnub no. Ua tsaug rau nws, tib neeg tau kawm thaum kawg yuav ua li cas los tsim cov muaju ntawm silicon thiab ntau lwm yam khoom. Ua ntej hauv kev kuaj mob, thiab tom qab ntawd ntawm kev lag luam. Txoj kev loj hlob ib leeg muaju, nrhiav pom los ntawm tus kws tshawb fawb Polish zoo, tseem siv dav.
